RELATION OF THE OPTICAL AND ELECTRICAL PARAMETERS WITH PROCESS PARAMETERS IN TRANSPARENT CONDUCTOR COATINGS

Abstract

That the electric and optic parameters of glass coated with ITO containing an additive are affected according to the parameters has been observed using the reactive dc magnetron sputtering technique in this study. For different values of process parameters like the flow of argon gas, the flow of oxygen gas, power, transition speed and transmission number, optic transmission and the electrical conductivity values shown by transparent conductor glass coated with ITO are seen to be changing in the opposite direction to each other as expected. The increase in conductivity causes the decrease in transmission. The values of process parameters that provide an optimum level for these two parameters have been searched. In experiments, the values determined in advance for the flow of argon gas, transition speed and transition number have been used and only the flow of oxygen gas and power parameters have been changed. At the end of the change in these two parameters, % 78 and 65 ohm per square values for transmission and conductivity of glass have been got as the optimal values.